LEO SUPRA Scanning Electron Microscopes

　The ZEISS ULTRA series, based on the SUPRA FESEM series comprises a high efficiency, high resolution in-column EsB detector which enables ultra high resolution BSE imaging.
　The ZEISS ULTRA series integrates the latest developments in the GEMINI technology utilising a newly developed Energy and angle selective Backscattered detector (EsB). The ULTRA comprises the GEMINI In-lens SE detector for clear topographic imaging and the EsB detector for compositional contrast imaging enabling simultaneous real time imaging and mixing of both signals.
　The EsB detector incorporates a filtering grid which enables high resolution BSE imaging revealing previously unseen image details.

Compared to a chamber mounted BSE detector the ZEISS ULTRA with the EsB detector has following advantages :

Precise and clear imaging
‧Ultra-high resolution BSE imaging
‧Less sensitive to charging effects
‧Compositional contrast imaging
‧Not sensitive to edge contrast
‧Ideal for precise boundary, feature and particle measurements

High Efficiency EsB detector
‧High efficiency direct detection principle for BSE and SE
‧No inefficient conversion plates required
‧Utilises the GEMINI electron optics for separation of BSE and SE
‧BSE imaging at low working distance – 1mm
‧Sensitive for ultra-low voltage imaging – 100V

Integrated filtering technology
‧Enables true BSE imaging
‧Allows energy selection of BSE
‧Suppresses charging effects of non conducting specimens

Ease of operation
‧Fully integrated detector, no need for adjustment
‧Simultaneous operation with the In-lens SE detector
‧Real time imaging and mixing of BSE and SE signal
‧Easy selection of filtering voltage

ZEISS ULTRA EsB Technology
‧EsB Detection Principle
‧EsB Filtering Technology
‧ULTRA application examples