HERO FAB (for 300 mm FOUP )
Versions
•Vehicle with robot and 2 buffers for FOUPs
•Vehicle with robot and 2 buffers for open cassettes
•Vehicle with robot and 4 buffers for 200 mm SMIF pods
Key Features
Key Features
- Fully free-moving platform and ultimate maneuverability with omni-directional drive technology
- Vibration-free handling with powerful, for 24/7 use proven industrial 6-axis robot
- Charging on-the-fly during handling enables 24/7 operation
- Vertical & horizontal laser scanners for a safe collaboration of human and machine
- High material safety due to redundant sensors, active lock in an emergency case and occupancy check of load ports (special: earthquake protection)
- HSFM fleet manager for multi robot management