HERO FAB (for 300 mm FOUP )

Versions

•Vehicle with robot and 2 buffers for FOUPs

•Vehicle with robot and 2 buffers for open cassettes

•Vehicle with robot and 4 buffers for 200 mm SMIF pods

Key Features

Fully free-moving platform and ultimate maneuverability with omni-directional drive technology
Vibration-free handling with powerful, for 24/7 use proven industrial 6-axis robot
Charging on-the-fly during handling enables 24/7 operation
Vertical & horizontal laser scanners for a safe collaboration of human and machine
High material safety due to redundant sensors, active lock in an emergency case and occupancy check of load ports (special: earthquake protection)
HSFM fleet manager for multi robot management