| • Upgradable UV and Confocal in the future |
| • Automatic light and aperture management |
| • Accurate Mechanical limit switch to pretect wafer crashed |
| • Color - abberation free Zeiss ICS optics |
| • Free malfunction motorized Nosepiece and Mechanical stage |
| • Measuring stage can be option |
| • Digital Imaging Network |
| • Photo mask developed is also possible |
|