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Axiospect 301
Front and Back Side Inspection and Review System
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→ 12Inches Inspection Tools |
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• Successor to the well established, reliable 300 mm inspection and review tool Axiospect 300.
• Front- and back side inspection and review.
• Sorter function, also with back side flip.
• Edge-grip design for wafer handling ensures less contamination on wafer back side.
• Integrated flip module on robot.
• Edge-grip prealigner.
• High-end optical microscopes by Carl Zeiss support all common contrast techniques, including white-light confocal and ultraviolet microscopy.
• Macro Inspection with homogenous and super-bright grazing illumination and with Defect Documentation option.
• Several metrology options available, such as CD and film thickness measurement.
• Single mature software platform for all systems and options. |
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Download
Footprint Drawing (PNG, 88.1k)
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