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Axiospect 201 Review station
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→ 8 inches ( better than 0.13um resolution ) |
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• 6"...8" wafer inspection and review system
• Modular design allows flexible system layout and minimized footprint
• Available in non-SMIF and SMIF versions
• Suitable for ISO class 3 or better minienvironments
• Easy integration of options for macro inspection, edge inspection, film thickness measurement etc.
• Suitable for complete Carl Zeiss "Axiotron 2" product range, including CSM and UV
• Eyepieces and additional 14" video live monitor for easy operation
• SmartVIEW software on Windows 2000 for system control |
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