• Advanced 200 mm optical inspection and review tool with up to four wafer handling interfaces.
• Suitable for SMIF- and non-SMIF environments.
• Front- and back side inspection and review.
• Sorter function, also with back side flip.
• Edge-grip design for wafer handling ensures less contamination on wafer back side.
• Integrated flip module on robot.
• Edge-grip prealigner.
• High-end optical microscopes by Carl Zeiss support all common contrast techniques, including white-light confocal and ultraviolet microscopy.
• Macro Inspection with homogenous and super-bright grazing illumination and with Defect Documentation option.
• Several metrology options available, such as CD and film thickness measurement.
• Single mature software platform for all systems and options.