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8 Inches Inspection Tools

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 Axiotron2
for 4-8 inches inspection Microscope

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 ZML200
for 4-8 inches wafer Loader ( Non smif type )

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 CSM
for 4-8 inches Confocal Microscope ( 0.18 um resolution )

CSM-UV
for 4-8 inches Confocal UV Microscope ( 0.13 um resolution )

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 UV-S
for 4-8 inches 365nm UV Microscope ( 0.13 um resolution )

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Axiotron-UV
for 4-8 inches 365nm and 248nm UV Microscope ( better than 0.1um )

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 ULTRAObjective
for Atomic force microscope and SPM ( better than 1nm )

Axiosprint
for 4-8 inches ADI/AEI and inspection station
( better than 0.13um resolution and high throughput design )

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 Axiospect 200
8 inches  ( better than 0.13um resolution )

12 Inches Inspection Tools

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Axiospect 300 ( NEW ) inspection station for ADI/AEI and inspection station
( better than 0.1um resolution)

Axiospect 300 ( NEW ) review station for review station  ( better than 0.1um resolution )

Axiotron 300 ( NEW ) microscope  ( better than 0.1um resolution )

Mask simulation Tools

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 MSM100
for I-line, G-line, DUV tool

MSM193
for 193nm tool

Aims-fab 248
for I-line, DUV Masks Inspection

Aims-fab 193 (Release soon)
　
台灣儀器行股份有限公司 　台北市南京東路三段272號4樓
TEL:(02)2772-3333　FAX:(02)2731-1700　客戶申訴專線 :(02)2711-6211

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確保晶圓品質，提供高解析度之光學設備——為確保半導體晶圓產品，品質精良，並提昇精密電子工業技術，提供高解析度之光學儀器設備，適用於所有IC製造/設計廠，以及LCD檢查，後段封裝之需要，並提供ADI/AEI、AFI、QA、QC、testing，F.A.部門所需之檢測設備。目前並提供12吋晶圓製程0.15、0.13、0.1之高解析檢測儀器設備，如：Axiospect300(12吋)、Axiospect200(8吋)、Axiosprint(6吋、8吋)、Aims-Fab　248nm(5,6,7,吋Mask)、Aims-Fab193nm(光罩defect檢測模擬設備)、Axiostron 2+CSM+UV之工業光學顯微鏡、共軛焦光學顯微鏡及UV光學顯微鏡。